15.2 Wall Surface Reactions and Chemical Vapor Deposition

For gas-phase reactions, the reaction rate is defined on a volumetric basis and the rate of creation and destruction of chemical species becomes a source term in the species conservation equations. Heterogeneous surface reactions create sources (and sinks) of chemical species in the gas-phase as well, but also alter surface coverages for surface site reactions, and may deposit or etch species for bulk (solid) reactions.

For more information about the theoretical background of wall surface reactions and chemical vapor depositions, see this section in the separate Theory Guide. Information about using wall surface reactions is presented in the following subsections: